diff --git a/arch/arm/src/armv7-a/cp15_cacheops.c b/arch/arm/src/armv7-a/cp15_cacheops.c
index d7bf4a4e5e..562cab4723 100644
--- a/arch/arm/src/armv7-a/cp15_cacheops.c
+++ b/arch/arm/src/armv7-a/cp15_cacheops.c
@@ -52,9 +52,7 @@ static inline uint32_t cp15_cache_get_info(uint32_t *sets, uint32_t *ways,
 
   csselr = CP15_GET(CSSELR);
 
-  csselr = (csselr & ~0x01) | (icache & 0x01);
-
-  CP15_SET(CSSELR, csselr);
+  CP15_SET(CSSELR, (csselr & ~0x01) | (icache & 0x01));
 
   ccsidr = CP15_GET(CCSIDR);
 
@@ -68,6 +66,8 @@ static inline uint32_t cp15_cache_get_info(uint32_t *sets, uint32_t *ways,
       *ways = ((ccsidr >> 3) & 0x3ff) + 1;
     }
 
+  CP15_SET(CSSELR, csselr);   /* restore csselr */
+
   return (1 << ((ccsidr & 0x7) + 2)) * 4;
 }
 
diff --git a/arch/arm/src/armv7-m/arm_cache.c b/arch/arm/src/armv7-m/arm_cache.c
index 88bc5ac2b5..f326316f1d 100644
--- a/arch/arm/src/armv7-m/arm_cache.c
+++ b/arch/arm/src/armv7-m/arm_cache.c
@@ -129,17 +129,20 @@ static size_t up_get_cache_linesize(bool icache)
 
   if (icache)
     {
-      csselr = (csselr & ~NVIC_CSSELR_IND) | NVIC_CSSELR_IND_ICACHE;
+      putreg32((csselr & ~NVIC_CSSELR_IND) |
+                NVIC_CSSELR_IND_ICACHE, NVIC_CSSELR);
     }
   else
     {
-      csselr = (csselr & ~NVIC_CSSELR_IND) | NVIC_CSSELR_IND_DCACHE;
+      putreg32((csselr & ~NVIC_CSSELR_IND) |
+                NVIC_CSSELR_IND_DCACHE, NVIC_CSSELR);
     }
 
-  putreg32(csselr, NVIC_CSSELR);
   ccsidr = getreg32(NVIC_CCSIDR);
   sshift = CCSIDR_LSSHIFT(ccsidr) + 4;   /* log2(cache-line-size-in-bytes) */
 
+  putreg32(csselr, NVIC_CSSELR);    /* restore csselr */
+
   return 1 << sshift;
 }
 
@@ -170,11 +173,13 @@ static size_t up_get_cache_size(bool icache)
 
   if (icache)
     {
-      csselr = (csselr & ~NVIC_CSSELR_IND) | NVIC_CSSELR_IND_ICACHE;
+      putreg32((csselr & ~NVIC_CSSELR_IND) |
+                NVIC_CSSELR_IND_ICACHE, NVIC_CSSELR);
     }
   else
     {
-      csselr = (csselr & ~NVIC_CSSELR_IND) | NVIC_CSSELR_IND_DCACHE;
+      putreg32((csselr & ~NVIC_CSSELR_IND) |
+                NVIC_CSSELR_IND_DCACHE, NVIC_CSSELR);
     }
 
   ccsidr = getreg32(NVIC_CCSIDR);
@@ -183,6 +188,8 @@ static size_t up_get_cache_size(bool icache)
   sshift = CCSIDR_LSSHIFT(ccsidr) + 4;   /* log2(cache-line-size-in-bytes) */
   line   = 1 << sshift;
 
+  putreg32(csselr, NVIC_CSSELR);    /* restore csselr */
+
   return sets * ways * line;
 }
 #endif
diff --git a/arch/arm/src/armv7-r/cp15_cacheops.c b/arch/arm/src/armv7-r/cp15_cacheops.c
index 74da551a81..94f4aa3d3a 100644
--- a/arch/arm/src/armv7-r/cp15_cacheops.c
+++ b/arch/arm/src/armv7-r/cp15_cacheops.c
@@ -52,9 +52,7 @@ static inline uint32_t cp15_cache_get_info(uint32_t *sets, uint32_t *ways,
 
   csselr = CP15_GET(CSSELR);
 
-  csselr = (csselr & ~0x01) | (icache & 0x01);
-
-  CP15_SET(CSSELR, csselr);
+  CP15_SET(CSSELR, (csselr & ~0x01) | (icache & 0x01));
 
   ccsidr = CP15_GET(CCSIDR);
 
@@ -68,6 +66,8 @@ static inline uint32_t cp15_cache_get_info(uint32_t *sets, uint32_t *ways,
       *ways = ((ccsidr >> 3) & 0x3ff) + 1;
     }
 
+  CP15_SET(CSSELR, csselr);   /* restore csselr */
+
   return (1 << ((ccsidr & 0x7) + 2)) * 4;
 }
 
diff --git a/arch/arm/src/armv8-m/arm_cache.c b/arch/arm/src/armv8-m/arm_cache.c
index 35aa14d992..e7a7e504ed 100644
--- a/arch/arm/src/armv8-m/arm_cache.c
+++ b/arch/arm/src/armv8-m/arm_cache.c
@@ -129,17 +129,20 @@ static size_t up_get_cache_linesize(bool icache)
 
   if (icache)
     {
-      csselr = (csselr & ~NVIC_CSSELR_IND) | NVIC_CSSELR_IND_ICACHE;
+      putreg32((csselr & ~NVIC_CSSELR_IND) |
+                NVIC_CSSELR_IND_ICACHE, NVIC_CSSELR);
     }
   else
     {
-      csselr = (csselr & ~NVIC_CSSELR_IND) | NVIC_CSSELR_IND_DCACHE;
+      putreg32((csselr & ~NVIC_CSSELR_IND) |
+                NVIC_CSSELR_IND_DCACHE, NVIC_CSSELR);
     }
 
-  putreg32(csselr, NVIC_CSSELR);
   ccsidr = getreg32(NVIC_CCSIDR);
   sshift = CCSIDR_LSSHIFT(ccsidr) + 4;   /* log2(cache-line-size-in-bytes) */
 
+  putreg32(csselr, NVIC_CSSELR);    /* restore csselr */
+
   return 1 << sshift;
 }
 
@@ -170,11 +173,13 @@ static size_t up_get_cache_size(bool icache)
 
   if (icache)
     {
-      csselr = (csselr & ~NVIC_CSSELR_IND) | NVIC_CSSELR_IND_ICACHE;
+      putreg32((csselr & ~NVIC_CSSELR_IND) |
+                NVIC_CSSELR_IND_ICACHE, NVIC_CSSELR);
     }
   else
     {
-      csselr = (csselr & ~NVIC_CSSELR_IND) | NVIC_CSSELR_IND_DCACHE;
+      putreg32((csselr & ~NVIC_CSSELR_IND) |
+                NVIC_CSSELR_IND_DCACHE, NVIC_CSSELR);
     }
 
   ccsidr = getreg32(NVIC_CCSIDR);
@@ -183,6 +188,8 @@ static size_t up_get_cache_size(bool icache)
   sshift = CCSIDR_LSSHIFT(ccsidr) + 4;   /* log2(cache-line-size-in-bytes) */
   line   = 1 << sshift;
 
+  putreg32(csselr, NVIC_CSSELR);    /* restore csselr */
+
   return sets * ways * line;
 }
 #endif